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General
- Non-contact measurement of surface profiles, 2D/3D, vertical and lateral dimensions
- Examination of rough and smooth surfaces
- System can be equipped with a variety of sensors with different measurement ranges and different working principles (e.g., triangulation, chromatic, confocal, autofocus).
- Displacement in X,Y direction up to 300 mm, in Z direction up to 50 mm
- Lateral resolution better than 1 µm, vertical resolution approx.1 nm max. (depends on sensor)
- Determination of roughness parameters 2D / 3D, FFT, ACF, flatness, step height, slope
- Micro-topography of sheet metal, paper, glass, plastics, wafer, machine tools and others
- Dimensional measurement of micro mechanical elements
- Macro language for automated measurement sequence
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