Technical Data

 

Sensor

Default sensor: confocal chromatic sensor
Vertical measurement range	[mm]	1
Vertical resolution, max.	[nm]	30
Lateral resolution, max.	[µm]	3
Stand off, approx.	[mm]	24
Spot size, approx.	[µm]	6
Measurement frequency, max.*	[kHz]	1-10

 

Measurement stages

Standard version
Maximum travel per axis	[mm]	50
Minimum step size	[µm]	0.5
Relative straightness (over 100 mm per axis)	[µm]	< ± 2
Flatness (over 100 mm in XY plane)	[µm]	< ± 4

System

Stage controller with integrated power supply
State-of-the-art PC
Vibration damping
Sensor controller for a maximum data acquisition rate of 100 kHz
Operating system Windows XP / 7
3D BMT software package for measurement and data evaluation
Dimensions, H x W x D	[mm]	600 x 1050 x 500
Weight, approx.	[kg]	85
Power supply	[V, Hz]	115-230, 50/60
Standards	all relevant CE standards

Options

System can be equipped with a variety of sensors with different measurement ranges and different working principles (e.g.,triangulation, chromatic, confocal, autofocus).
Microscope kit for all sensors
Calibration standard for sensor calibration
Flatness standard for stage verification
Workstation with integrated vibration damper
Z-Range expander to extend vertical measurement range
Motorized stages 100 - 300 mm
Air Bearing XY-stages 50 - 300 mm for highest requirements
Rotary stage, ball bearing or air bearing
Vacuum fixture for paper, foils, etc.
B/W monitor for observation of object surface
Other sensors upon request


* Depends upon surface characteristics