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Technical Data

 

Thickness resolution	[nm]	< 1
Probing footprint, approx.	[µm]	150 (or acc. to request of customer)
Thickness range, approx.	[µm]	0.1 - 600
Dimensions, approx.	[mm]	20 x 320 x 380
Weight, approx.	[kg]	120

 

Wafer fixture acc. to customer’s requirements up to 12”

Fully automated measurement.

Standard or customized software package.