Technical Data

Measurement head

Light source		LED (Halogen)
Measurement range (Piezo)	[µm]	100/150
Resolution vertical	[nm]	<1
Resolution lateral	[µm]	30
Stand off	[mm]	24
Measurement area	[mm]	14 x 10
Digital camera 8/12 Bit	[Pixel]	1392 x 1040

 

Options

Workstation with passive air dampers
Motorized stages:
Displacement XYZ	[mm]	50-300 (customised)
Step width	[µm]	1
Motorized tilting table for measurement object adjustment
High-speed camera / Mega pixel camera
Customized fixtures
Calibration standards

Software

Operating system Windows XP / 7

Measurement and evaluation software for standard, scientific and industrial applications and customised modules available.