Technical Data

Measurement head (standard values)

All data are subjective to be changed without notice. All instruments are manufactured according to the customer’s requirements if possible.

Light sources		LEDs
Measuring/focusing range with internal motor, approx.	[mm]	15
Measuring/focusing range with piezo actuator, approx.	[µm]	200
Resolution vertical, approx.	[nm]	< 0.1
Image size, approx. (different cameras are used depending on the application)	[Pixel]	1400 x 1000
Dynamic range, max. approx.	[bit]	14
Turret 3x – 6x, depending on customer’s request.
Motorised turret on request. Motorised head displacement on request.

 

Translation stages

Displacement (x,y,z), depends on customer’s application	[mm]	50 – 300 or more
Step width (µm), approx.	[µm]	1
Flatness/100 mm, approx.	[µm]	1

Objectives (available types)

Magnification	NA	Stand-off	Measurement area approx.	Resolution lateral approx.
	[mm]	[mm]	[µm2]	[µm2]
x 2.5	<0.01	10.3	5000 x 4500	< 10
x 5	0.13	9.3	2500 x 2200	< 5
x 10	0.3	7	1250 x 1100	< 2
x 20	0.4	5	640 x 550	< 1
x 50	0.55	3.4	250 x 250	< 1
x 100	0.7	2	100 x 100	< 0.5

Software

Measurement and evaluation software for standard and scientific applications.

Customised modules available on request. Envelope and phase evaluation are standard.

Stitching feature is standard. Unique double exposure feature is standard. Autofocus is standard.