Technical Data

Measurement head

Light source		LED
Measurement range	[mm]	150
Vertical resolution	[nm]	<0.1
Lateral resolution	[µm]	≥0.2
Stand off	[mm]	0.3 (1)
Measurement area (objective dependent)	[µm]	90 x 70
Image size	[Pixel]	1280 x 1024

 

Options

Motorized stages:
Displacement XY(Z)	[mm]	50(...200)
Step width, min.	[µm]	1
Workstation with passive air dampers
Customized fixtures
Calibration standard
High-speed camera / Mega pixel camera

Software

Operating system Windows XP / 7

Measurement and evaluation software for standard, scientific and industrial applications and customised modules available.