Technical Data

Measurement head

Standard version
Light source		LED
Measurement range corresponds to stroke
Resolution vertical	[nm]	<1
Resolution lateral	[µm]	≥1
Working distance, approx.	[mm]	1
Measurement area size	object dependent
Image size	[Pixel]	1000 x 1000

 

Options

Workstation with vibration dampers

High speed camera / Megapixel camera

Customised workpiece fixtures

Stages

Stroke Z	[mm]	10-50
Step sizes, min.	[um]	1

Construction

The standard version features a stationary measurement head and this has no moving parts. The work-piece is held by a suitable fixture. The measuring light beam emerging from the head is directed onto the workpiece side face by a conical mirror. From there it is reflected back into the optical system inside the head. Dependent on the measurement object a conical mirror inside or outside of the object, respectively, is utilised. The deflection mirror is moved by a motor in axial direction. The movement distance corresponds therefore to the lenght of the measurement area. Ring shaped individual areas are measured which are stitched together by software to yield the total measured area.

Software

Operating system Windows XP/7

Measurement and evaluation software for standard, scientific, industrial and customised applications.